Flexible MEMs

A MEMS-based flexible multichannel ECoG-electrode array.

We present a micromachined 252-channel ECoG (electrocorticogram)-electrode array, which is made of a thin polyimide foil substrate enclosing sputtered platinum electrode sites and conductor paths. The array subtends an area of approximately 35 mm by 60 mm and is designed to cover large parts of a hemisphere of a macaque monkey's cortex. Eight omnetics connectors are directly soldered to the foi...

Flexible MEMS Technology and Shear Stress Sensor Skin

Simulation of MEMS Based Flexible Flow Sensor for Biomedical Application

Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood not only interacts with vessel wall mechanically but also chemically which modulates the plaque formation in blood vessel thus leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer pr...

Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

With the rapid development of Micro-electro-mechanical Systems (MEMS) fabrication technologies, many microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit excellent characteristics i...

A Flexible Fabrication Process for RF MEMS Devices

RF MEMS are assuming a great importance in the fast evolving telecommunication market and space applications. In the last years a flexible technology platform has been developed and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components as well as complex RF circuits working in the frequency range from sub-GHz up to more than 100 GHz. The paper reports about the f...